Simulation of Flexible Dual-mode Surface Acoustic Wave Resonator for Strain Sensor Application
نویسندگان
چکیده
Abstract Based on the requirement of flexible electronic devices (FED)such as surface acoustic wave (SAW) sensors, finite element models for material analysis and SAW resonator design were established. Dual-mode Rayleigh Horizontal Shear mode 0ºY cut LiNbO 3 thin film was discovered. The influence BCB thickness PI substrate resonant analyzed. owned high sensitivity both in shear under tensile stress compressive by simulation.
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2023
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/2508/1/012016